Laser chemical vapor deposition
Laser chemical vapor deposition (LCVD) is a chemical process used to produce high purity, high performance films, fibers, and mechanical hardware (MEMS). The process is used in the semiconductor industry for spot coating, the MEMS industry for 3-D printing of hardware such as springs and heating elements,2,6,7,9 and the composites industry for boron and ceramic fibers. As with conventional CVD, one or more gas phase precursors are thermally decomposed, and the resulting chemical species 1) deposit on a surface, or 2) react, form the desired compound, and then deposit on a surface, or a combination of (1) and (2).
- Method and Apparatus For the Freeform Growth of Three-Dimensional Structures Using Pressurized Precursor Flows and Growth Rate Control (US Patent # 5,786,023)
- Laser Assisted Fiber Growth (US Patent # 5,126,200)
- T. Wallenberger, Frederick & C. Nordine, Paul & Boman, Mats. (1994). “Inorganic fibers and microstructures directly from the vapor phase”. Composites Science and Technology v 51. pp. 193-212.
- T. Wallenberger, Frederick & C. Nordine, Paul. (1994). “Amorphous Silicon Nitride Fibers Grown from the Vapor Phase”. Journal of Materials Research v 9. pp. 527 - 530.
- Laser-assisted CVD Fabrication and Characterization of Carbon and Tungsten Microhelices for Microthrusters, Uppsala University, 2006, Dissertation, K.L. Williams
- Björklund, K.L & Lu, Jun & Heszler, P & Boman, Mats. (2002). “Kinetics, thermodynamics and microstructure of tungsten rods grown by thermal laser CVD”. Thin Solid Films v 416. pp. 41–48.
- Boman, Mats & Baeuerle, Dieter. (1995). “Laser‐Assisted Chemical Vapor Deposition of Boron”. Journal of the Chinese Chemical Society v 42.
- S. Harrison, J. Pegna, J. Schneiter, K.L. Williams, and R. Goduguchinta, (2017) “Laser Printed Ceramic Fiber Ribbons: Properties and Applications,” 2016 ICACC Proceedings/Ceramic Materials for Energy Applications VI, pp. 61-72
- Maxwell, James & Chavez, Craig & W. Springer, Robert & Maskaly, Karlene & Goodin, Dan. (2007). “Preparation of superhard BxCy fibers by microvortex-flow hyperbaric laser chemical vapor deposition”, Diamond and Related Materials v 16. pp. 1557-1564.
- Williams, K.L. & Jonsson, K & Köhler, Johan & Boman, Mats. (2007). “Electrothermal characterization of tungsten-coated carbon microcoils for micropropulsion systems”. Carbon v 45. pp. 484-492.
- Maxwell, James & Boman, Mats & W Springer, Robert & Narayan, Jaikumar & Gnanavelu, Saiprasanna. (2006). “Hyperbaric Laser Chemical Vapor Deposition of Carbon Fibers from the 1-Alkenes, 1-Alkynes, and Benzene”. Journal of the American Chemical Society v 128. pp. 4405-4413.
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